Nanostructure of Ge deposited on Si(001): a study by XPS peak shape analysis and AFM

Autor(en): Simonsen, AC
Schleberger, M
Tougaard, S
Hansen, JL
Larsen, AN
Stichwörter: atomic force microscopy; ATOMIC-FORCE MICROSCOPY; CALIBRATION; FILMS; GROWTH; Materials Science; Materials Science, Coatings & Films; Materials Science, Multidisciplinary; Physics; Physics, Applied; Physics, Condensed Matter; quantitative analysis; RAY PHOTOELECTRON-SPECTROSCOPY; SI(100); STM; SURFACE; surface morphology; X-ray photoelectron spectroscopy
Erscheinungsdatum: 1999
Herausgeber: ELSEVIER SCIENCE SA
Journal: THIN SOLID FILMS
Volumen: 338
Ausgabe: 1-2
Startseite: 165
Seitenende: 171
Zusammenfassung: 
The morphology of Ge overlayers with different thicknesses deposited on Si(001) at 560 degrees C, has been investigated with XPS peak shape analysis and AFM. From the peak shape analysis of the Ge 2p and the Si KLL lines we find island growth for all evaporations and no wetting layer. In the analysis, the structural parameters of the islands (coverage and height) are determined after each evaporation. The AFM images confirm island formation, and the magnitude of the structural parameters are in qualitative agreement with the XPS results. Additionally the amount of evaporated Ge is measured with RES and compared with the amount determined from the structural parameters of the islands. There is a systematic discrepancy which might be due to inaccuracy in the inelastic mean free path or to forward focusing effects.. Our study demonstrates that combining the complementary techniques, XPS peak shape analysis and AFM, gives a much more detailed picture of the surface nanostructure than with any of the techniques alone. (C) 1999 Elsevier Science S.A. All rights reserved.
ISSN: 00406090
DOI: 10.1016/S0040-6090(98)01079-7

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