Nanoscopic Morphologies in Block Copolymer Nanorods as Templates for Atomic-Layer Deposition of Semiconductors

Autor(en): Wang, Yong
Qin, Yong
Berger, Andreas
Yau, Eric
He, Changcheng
Zhang, Lianbing
Goesele, Ulrich
Knez, Mato
Steinhart, Martin 
Stichwörter: ANODIC ALUMINA; Chemistry; Chemistry, Multidisciplinary; Chemistry, Physical; CONFINEMENT; INFILTRATION; Materials Science; Materials Science, Multidisciplinary; MEMBRANE; Nanoscience & Nanotechnology; NANOWIRE ARRAYS; Physics; Physics, Applied; Physics, Condensed Matter; POROUS ALUMINA; REPLICATION; ROUTE; Science & Technology - Other Topics
Erscheinungsdatum: 2009
Herausgeber: WILEY-V C H VERLAG GMBH
Journal: ADVANCED MATERIALS
Volumen: 21
Ausgabe: 27
Startseite: 2763+
Zusammenfassung: 
Block-copolymer nanorods containing mesopore structures derived from confinement-induced nanoscopic morphologies were used as templates for atomic-layer deposition. Diffusion of the ALD precursors through the polymeric scaffold and deposition of ZnO on the walls of the internal mesopores yielded 1D ZnO nanostructures with hierarchical architectures containing helices and stacked doughnuts as structure motifs.
ISSN: 09359648
DOI: 10.1002/adma.200900136

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