A round robin experiment of elemental sensitivity factors in low-energy ion scattering
| Autor(en): | Brongersma, HH Carrere-Fontaine, H Cortenraad, R van der Gon, AWD Scanlon, PJ Spolveri, I Cortigiani, B Bardi, U Taglauer, E Reiter, S Labich, S Bertrand, P Houssiau, L Speller, S Parascandola, S Unlu-Lachnitt, H Heiland, W |
Stichwörter: | Instruments & Instrumentation; ion-solid interactions; LEIS; low-energy ion scattering; Nuclear Science & Technology; Physics; Physics, Atomic, Molecular & Chemical; Physics, Nuclear; QUANTIFICATION; SPECTROSCOPY; SURFACE; surface analysis | Erscheinungsdatum: | 1998 | Herausgeber: | ELSEVIER SCIENCE BV | Journal: | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | Volumen: | 142 | Ausgabe: | 3 | Startseite: | 377 | Seitenende: | 386 | Zusammenfassung: | In a round robin experiment a set of five polycrystalline, metallic samples is studied by low-energy ion scattering (LEIS) in five different laboratories, The energy range is 0.6-3.5 keV and He and Ne ions are used. Even though different experimental setups are used the evaluated elemental sensitivity factors agree within /-20%. Reproducibility within single laboratories is better than 10%. In an additional study carried out in three laboratories the surface composition of an alloy, Cu55Pd45, was determined, using in situ calibration standards, These surface composition measurements agreed within /-3 at% demonstrating that quantitative composition determination is possible using this procedure. (C) 1998 Elsevier Science B.V. All rights reserved. |
ISSN: | 0168583X | DOI: | 10.1016/S0168-583X(98)00264-X |
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