X-ray fluorescence study of organic-inorganic polymer conversion into ceramics induced by ion irradiation

Abstract

Changes to the local and electronic structures of phenyltriethoxysilane (PTES) films when irradiated at room temperature with gold ion concentrations of 5 x 10(14) to 2.5 x 10(15) cm(-2) and with carbon ion concentrations of 5 x 10(15) cm(-2) were studied using x-ray emission and photoelectron spectroscopies. The fluorescent ultrasoft silicon L-II,L-III and carbon K alpha x-ray emission spectra of unirradiated and irradiated PTES films were measured at the Advanced Light Source,and the Center for Advanced Microstructures and Devices. It is found that the PTES polymers that are exposed to ion doses higher than 5 x 10(14) cm(-2) convert to Si:O:C ceramics. Annealing the irradiated PTES polymer films at 1000 degrees C segregates the carbon atoms into sp(2)-like clusters. [S0163-1829(99)00546-9].