Polymer conversion into amorphous ceramics by ion irradiation
| Autor(en): | Kurmaev, EZ Moewes, A Pivin, JC Bach, M Endo, K Ida, T Shimada, S Neumann, M Shamin, SN Ederer, DL Iwami, M |
Stichwörter: | APPROXIMATION; COATINGS; ENERGY; FILMS; FLUORESCENCE; IMPLANTATION; Materials Science; Materials Science, Multidisciplinary; POLYCARBOSILANES; POLYSILOXANES; RAY-EMISSION SPECTROSCOPY | Erscheinungsdatum: | 2002 | Herausgeber: | KLUWER ACADEMIC PUBL | Journal: | JOURNAL OF MATERIALS SCIENCE | Volumen: | 37 | Ausgabe: | 17 | Startseite: | 3789 | Seitenende: | 3793 | Zusammenfassung: | We present results of X-ray fluorescence measurements (carbon Kalpha and Si L-2,L-3) of methylhydroxylsiloxane and phenylmethylhydroxylsiloxane films. The films are converted into amorphous ceramics by irradiation with 500 keV C and 3 MeV Au ions. Changes in the composition (O/Si ratio) of some polysiloxane films are found when treated with ion irradiation. It is shown that ion irradiation induces a segregation of carbon atoms from methyl groups into diamond-like clusters whereas carbon atoms from phenyl groups maintain their sp(2) configuration. (C) 2002 Kluwer Academic Publishers. |
ISSN: | 00222461 | DOI: | 10.1023/A:1016585930732 |
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