CHARACTERIZATION OF SHALLOW DONOR-DOPED SILICON MOLECULAR-BEAM EPITAXIAL LAYERS BY ELECTRON-SPIN RESONANCE
| Autor(en): | DIRKSMEYER, J SCHIRMER, OF |
Stichwörter: | Materials Science; Materials Science, Coatings & Films; Materials Science, Multidisciplinary; Physics; Physics, Applied; Physics, Condensed Matter | Erscheinungsdatum: | 1990 | Herausgeber: | ELSEVIER SCIENCE SA LAUSANNE | Enthalten in: | THIN SOLID FILMS | Band: | 184 | Startseite: | 55 | Seitenende: | 60 | Beschreibung: | 3RD INTERNATIONAL SYMP OF THE 1989 CONF OF THE EUROPEAN MATERIALS RESEARCH SOC : SILICON MOLECULAR BEAM EPITAXY, STRASBOURG, FRANCE, MAY 30-JUN 02, 1989 |
ISSN: | 00406090 | DOI: | 10.1016/0040-6090(90)90397-V |
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