SPUTTERING EFFECTS OF GARNETS

Autor(en): PRIGGEMEYER, S
BOMERMANN, J
ALBERS, T
KOSCHMIEDER, H
HEILAND, W
Stichwörter: COLLISION; Instruments & Instrumentation; Nuclear Science & Technology; Physics; Physics, Atomic, Molecular & Chemical; Physics, Nuclear
Erscheinungsdatum: 1994
Herausgeber: ELSEVIER SCIENCE BV
Journal: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volumen: 88
Ausgabe: 3
Startseite: 244
Seitenende: 246
Zusammenfassung: 
Garnets are oxidic materials of interest for magneto-optical applications including optical waveguides. In the context of sputter depth profiling of those materials etch rates are measured and preferential sputtering is observed. The experimental results are compared with TRIDYN calculations. The satisfactory agreement between experiment and calculations leads to the conclusion that the sputtering in these materials is dominated by collisional effects.
ISSN: 0168583X
DOI: 10.1016/0168-583X(94)95319-8

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