ION-BEAMS IN SURFACE PHYSICS - CONCEPTS, EXPERIMENTS AND APPLICATIONS

Autor(en): HEILAND, W
NARMANN, A
Stichwörter: ENERGY; Physics; Physics, Condensed Matter; SCATTERING
Erscheinungsdatum: 1993
Herausgeber: IOP PUBLISHING LTD
Journal: JOURNAL OF PHYSICS-CONDENSED MATTER
Volumen: 5
Ausgabe: 33A
Startseite: A245-A248
Zusammenfassung: 
The interaction of ion beams with solids and solid surfaces is described, over a wide range of energies, by classical trajectories. At low energies the elastic interaction between the ions and target atoms is important in determining the end of the trajectory, radiation damage and sputtering. The inelastic interaction, i.e. elementary excitations of the solid and ionization of target and projectile atoms, is relevant for the electronic stopping power, and hence the range of fast particles, and it is the cause of radiation damage in insulators and biological material. Applications of ion beams are surface analysis, sputtering, ion implantation and ion-beam modified thin-film growth.
Beschreibung: 
7TH LATIN-AMERICAN SYMP ON SURFACE SCIENCE ( SLAFS7-CIACSAI ), BARILOCHE, ARGENTINA, NOV 15-20, 1992
ISSN: 09538984
DOI: 10.1088/0953-8984/5/33A/082

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