CRATER FORMATION IN OXIDIC MATERIALS GENERATED BY USING ION AND LASER-BEAMS

Autor(en): PRIGGEMEYER, S
ARPS, JH
HEILAND, W
Stichwörter: Chemistry; Chemistry, Analytical; PB
Erscheinungsdatum: 1993
Herausgeber: SPRINGER VERLAG
Journal: FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY
Volumen: 346
Ausgabe: 1-3
Startseite: 214
Seitenende: 217
Zusammenfassung: 
The etch rate of material due to ion bombardment is the amount of material removed per unit time at a given set of beam parameters. Usually the etch rate is given in units of length/time. The length is measured as the depth of the craters formed by the ion/laser beam. With insulating materials a dependence was obtained of the etch rate on charging effects. Crater formation is also influenced by charging, i.e. `walls' are built around the craters. These effects were studied in different oxidic materials, (yttrium-iron-garnets (YIG) and gadolinium-gallium-garnets (GGG)).
Beschreibung: 
7TH WORKING CONF ON APPLIED SURFACE ANALYSIS, JULICH, GERMANY, JUN 22-25, 1992
ISSN: 09370633
DOI: 10.1007/BF00321417

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