Mean projected range and range straggling of Bi+ ions implanted into lithium triborate

Autor(en): Wang, KM
Hu, H
Lu, F
Chen, F
Zhang, JH
Liu, XD
Shi, BR
Liu, YG
Stichwörter: BEHAVIOR; Instruments & Instrumentation; Nuclear Science & Technology; Physics; Physics, Atomic, Molecular & Chemical; Physics, Nuclear
Erscheinungsdatum: 2001
Herausgeber: ELSEVIER SCIENCE BV
Journal: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volumen: 174
Ausgabe: 1-2
Startseite: 65
Seitenende: 69
Zusammenfassung: 
Lithium triborate (LiB3O5) crystals were cut along the z-direction, optically polished and implanted with Bi+ ions at energies ranging from 100 to 350 keV with increments of 50 keV. The nominal fluence was 1 x 10(16) ions/cm(2). The mean projected range and range straggling of implanted Bi+ ions in LiB3O5 were determined using the Rutherford backscattering technique with 2.1 MeV He2+ ions, and its result was compared with the one calculated by using transport of ions in matter (TRIM) code. The result shows that the experimental mean projected range was systematically larger than the one predicted by TRIM, the maximum difference being 19%. In addition the range straggling deviated significantly from the predicted TRIM values by a factor of two. (C) 2001 Elsevier Science B.V. All rights reserved.
ISSN: 0168583X
DOI: 10.1016/S0168-583X(00)00453-5

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