INTERNAL ENERGY-DISTRIBUTION OF SPUTTERED SULFUR MOLECULES

Autor(en): DEJONGE, R
BALLER, T
TENNER, MG
DEVRIES, AE
SNOWDON, KJ
Stichwörter: Instruments & Instrumentation; Nuclear Science & Technology; Physics; Physics, Atomic, Molecular & Chemical; Physics, Nuclear
Erscheinungsdatum: 1986
Herausgeber: ELSEVIER SCIENCE BV
Journal: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volumen: 17
Ausgabe: 3
Startseite: 213
Seitenende: 226
ISSN: 0168583X
DOI: 10.1016/0168-583X(86)90060-1

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