A segmented Faraday cup for two-dimensional representation of the current distribution of an ion beam

Autor(en): Knolle, D
Ratschko, D
Glaser, M
Stichwörter: Instruments & Instrumentation; Physics; Physics, Applied
Erscheinungsdatum: 1996
Herausgeber: AMER INST PHYSICS
Journal: REVIEW OF SCIENTIFIC INSTRUMENTS
Volumen: 67
Ausgabe: 9
Startseite: 3082
Seitenende: 3084
Zusammenfassung: 
A Faraday cup with 37 segments has been developed to measure the two-dimensional current distribution I=f(x,y) and the total beam current of an ion beam. With an overall cross-sectional area of about 3420 mm(2), reproducible current measurements can be carried out down to some nanoamperes. The Faraday cup is used to measure ion beams in an energy range up to 25 keV and beam currents up to 10 mA. The current is determined on the basis of the voltage drop at selected metal film resistors. Initial results confirm good practical applicability in the analysis and adjustment of ion beams. (C) 1996 American Institute of Physics.
ISSN: 00346748
DOI: 10.1063/1.1146919

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